THE STUDY OF TEMPERATURE INFLUENCE ON THE OUTPUT SIGNAL
OF A SILICON RESONANT PRESSURE TRANSDUCER

Kudryavtseva Dar'ya Aleksandrovna, postgraduate student, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), dashuliy2308@yandex.ru
Tsypin Boris Vul'fovich, doctor of technical sciences, professor, sub-department of rocket-space and aviation instrument, Penza State University (40 Krasnaya street, Penza, Russia), cypin@yandex.ru

51-74:621, 681.5

Background. The object of research is the design of a silicon resonant pressure transducer. The research is temperature error of the proposed design of the Converter. The aim of this work is to study the effect of temperature on the output signal of a silicon resonant pressure transducer.
Materials and methods. And given the advantages of using resonant method for conversion of measuring signals of sensors of mechanical quantities for the creation of measuring instruments, characterized by high noise immunity. The design of a resonant pressure transducer in the form of a monolithic frame with wire of single-crystal silicon, operating in the mode defined length. Considered the advantage of monocrystalline silicon as material for the manufacture of vibrating element. The mechanical characteristics of the alloys traditionally used in instrument making for production of sensitive elements of measuring deformation type. It analyses the structure of an expression to calculate the additional temperature error of the resonant Converter pressure obtained by the differential conversion function.
Results. To study the effect of temperature on the output signal of a silicon resonant pressure transducer the calculation of an additional temperature error, and mathematical modeling of temperature error in the range up to 300 °C for silicon and a number of common engineering alloys.
Conclusions. Results of the researches spent in article, show that the offered design of the silicon resonant converter is deprived the lacks inherent in traditional variants with a metal string and possesses the best reproducibility of characteristics. The temperature error of the offered silicon design twice is less, than at a design with a string from metal alloys.

resonant pressure transducer, additional temperature error, precision alloy, silicon string.